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121154-2026

Process Monitoring Tool for Wafer Handling

DE, European Union

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Basic information

Reference number
121154-2026
Issuing organization
N/A
Government level
Federal
Solicitation type
Other
Title
Process Monitoring Tool for Wafer Handling
Source
TED (EU)
Source ID
121154-2026

Details

Location
DE, European Union

Summary

Procurement of an advanced wafer handling system to upgrade an existing Nanofocus topography measurement system. The system will handle both 300mm and 200mm wafers in a separately enclosed environment, compatible with SEMI standard FOUPs.

Dates

Publication
2026/02/20 12:00:00 AM UTC
Closing date
N/A

How to bid

Classification

Normalized category

Other

Source: TED (EU)

Last updated 2026-04-18, 4:45:54 p.m.

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